FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)

Master's

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Bibliographic Details
Main Author:	LUO JIA
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	VCSEL Oxidation Deal & Grove Model Selectivity Repeatability MSA Uniformity Oxidation Rate Gas Flow Furnace
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/153964
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-153964
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spelling	sg-nus-scholar.10635-1539642019-05-10T13:15:07Z FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL) LUO JIA SINGAPORE-MIT ALLIANCE CHUA SOO JIN CHU CHEN VCSEL Oxidation Deal & Grove Model Selectivity Repeatability MSA Uniformity Oxidation Rate Gas Flow Furnace Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS 2019-05-10T04:54:37Z 2019-05-10T04:54:37Z 2008 Thesis LUO JIA (2008). FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL). ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153964 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	VCSEL Oxidation Deal & Grove Model Selectivity Repeatability MSA Uniformity Oxidation Rate Gas Flow Furnace
spellingShingle	VCSEL Oxidation Deal & Grove Model Selectivity Repeatability MSA Uniformity Oxidation Rate Gas Flow Furnace LUO JIA FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE LUO JIA
format	Theses and Dissertations
author	LUO JIA
author_sort	LUO JIA
title	FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)
title_short	FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)
title_full	FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)
title_fullStr	FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)
title_full_unstemmed	FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)
title_sort	feasibility study and variables control of lateral wet oxidation process for vertical cavity surface emitting laser (vcsel)
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/153964
_version_	1681099320732942336

FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)

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