A modeling study of ion implantation in crystalline silicon involving Monte Carlo and molecular dynamics methods

Ph.D

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Bibliographic Details
Main Author:	CHAN HAY YEE, SERENE
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Ion Implantation Monte Carlo Molecular Dynamics
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15696
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15696
record_format	dspace
spelling	sg-nus-scholar.10635-156962015-01-15T23:42:43Z A modeling study of ion implantation in crystalline silicon involving Monte Carlo and molecular dynamics methods CHAN HAY YEE, SERENE CHEMICAL & BIOMOLECULAR ENGINEERING SRINIVASAN, MADAPUSI P Ion Implantation Monte Carlo Molecular Dynamics Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:56:23Z 2010-04-08T10:56:23Z 2006-12-19 Thesis CHAN HAY YEE, SERENE (2006-12-19). A modeling study of ion implantation in crystalline silicon involving Monte Carlo and molecular dynamics methods. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15696 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Ion Implantation Monte Carlo Molecular Dynamics
spellingShingle	Ion Implantation Monte Carlo Molecular Dynamics CHAN HAY YEE, SERENE A modeling study of ion implantation in crystalline silicon involving Monte Carlo and molecular dynamics methods
description	Ph.D
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING CHAN HAY YEE, SERENE
format	Theses and Dissertations
author	CHAN HAY YEE, SERENE
author_sort	CHAN HAY YEE, SERENE
title	A modeling study of ion implantation in crystalline silicon involving Monte Carlo and molecular dynamics methods
title_short	A modeling study of ion implantation in crystalline silicon involving Monte Carlo and molecular dynamics methods
title_full	A modeling study of ion implantation in crystalline silicon involving Monte Carlo and molecular dynamics methods
title_fullStr	A modeling study of ion implantation in crystalline silicon involving Monte Carlo and molecular dynamics methods
title_full_unstemmed	A modeling study of ion implantation in crystalline silicon involving Monte Carlo and molecular dynamics methods
title_sort	modeling study of ion implantation in crystalline silicon involving monte carlo and molecular dynamics methods
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15696
_version_	1681079238108643328

A modeling study of ion implantation in crystalline silicon involving Monte Carlo and molecular dynamics methods

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