Linearization and control of dual-axis micromirror

Ph.D

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Bibliographic Details
Main Author:	ZHAO YI
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	MEMS, Dual-Axis Micromirror, Electrostatic Actuation, Scanning Nonlinearity, Lineariztion, Pull-in Instability
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15767
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15767
record_format	dspace
spelling	sg-nus-scholar.10635-157672015-01-22T22:09:05Z Linearization and control of dual-axis micromirror ZHAO YI MECHANICAL ENGINEERING TAY ENG HOCK CHAU FOOK SIONG MEMS, Dual-Axis Micromirror, Electrostatic Actuation, Scanning Nonlinearity, Lineariztion, Pull-in Instability Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:57:13Z 2010-04-08T10:57:13Z 2006-12-29 Thesis ZHAO YI (2006-12-29). Linearization and control of dual-axis micromirror. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15767 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	MEMS, Dual-Axis Micromirror, Electrostatic Actuation, Scanning Nonlinearity, Lineariztion, Pull-in Instability
spellingShingle	MEMS, Dual-Axis Micromirror, Electrostatic Actuation, Scanning Nonlinearity, Lineariztion, Pull-in Instability ZHAO YI Linearization and control of dual-axis micromirror
description	Ph.D
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING ZHAO YI
format	Theses and Dissertations
author	ZHAO YI
author_sort	ZHAO YI
title	Linearization and control of dual-axis micromirror
title_short	Linearization and control of dual-axis micromirror
title_full	Linearization and control of dual-axis micromirror
title_fullStr	Linearization and control of dual-axis micromirror
title_full_unstemmed	Linearization and control of dual-axis micromirror
title_sort	linearization and control of dual-axis micromirror
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15767
_version_	1681079249922949120

Linearization and control of dual-axis micromirror

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