PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS
Master's
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| Format: | Theses and Dissertations |
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2019
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/159230 |
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sg-nus-scholar.10635-1592302024-04-17T09:43:52Z PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS CHEN GEOK LOO PHYSICS LI YI LIN JIANYI Master's MASTER OF SCIENCE 2019-09-16T02:58:33Z 2019-09-16T02:58:33Z 1999 Thesis CHEN GEOK LOO (1999). PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/159230 CCK BATCHLOAD 20190911 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
PHYSICS |
| author_facet |
PHYSICS CHEN GEOK LOO |
| format |
Theses and Dissertations |
| author |
CHEN GEOK LOO |
| spellingShingle |
CHEN GEOK LOO PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS |
| author_sort |
CHEN GEOK LOO |
| title |
PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS |
| title_short |
PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS |
| title_full |
PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS |
| title_fullStr |
PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS |
| title_full_unstemmed |
PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS |
| title_sort |
preparation and characterization of reactive rf sputtered nitride thin films |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/159230 |
| _version_ |
1800913766673547264 |