Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
10.1002/(SICI)1096-9918(199908)28:1<245::AID-SIA586>3.0.CO;2-I
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/97574 |
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| Institution: | National University of Singapore |