Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films

10.1002/(SICI)1096-9918(199908)28:1<245::AID-SIA586>3.0.CO;2-I

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Main Authors:	Chen, G.L., Li, Y., Lin, J., Huan, C.H.A., Guo, Y.P.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97574
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-975742023-12-05T03:10:26Z Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P. MATERIALS SCIENCE PHYSICS 10.1002/(SICI)1096-9918(199908)28:1<245::AID-SIA586>3.0.CO;2-I Surface and Interface Analysis 28 1 245-249 SIAND 2014-10-16T09:36:51Z 2014-10-16T09:36:51Z 1999 Article Chen, G.L., Li, Y., Lin, J., Huan, C.H.A., Guo, Y.P. (1999). Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films. Surface and Interface Analysis 28 (1) : 245-249. ScholarBank@NUS Repository. https://doi.org/10.1002/(SICI)1096-9918(199908)28:1<245::AID-SIA586>3.0.CO;2-I 01422421 http://scholarbank.nus.edu.sg/handle/10635/97574 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1002/(SICI)1096-9918(199908)28:1<245::AID-SIA586>3.0.CO;2-I
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P.
format	Article
author	Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P.
spellingShingle	Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P. Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
author_sort	Chen, G.L.
title	Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
title_short	Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
title_full	Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
title_fullStr	Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
title_full_unstemmed	Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
title_sort	post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97574
_version_	1784855515131543552

Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films

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