An integrated sputter-ion pump add-on lens unit for scanning electron microscopes

Master's

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Bibliographic Details
Main Author:	WU JUNLI
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	integrated,sputter-ion pump, add-on lens,scanning electron microscopes,high vacuum,specimen surface contamination
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/16021
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-16021
record_format	dspace
spelling	sg-nus-scholar.10635-160212024-10-26T02:11:39Z An integrated sputter-ion pump add-on lens unit for scanning electron microscopes WU JUNLI ELECTRICAL & COMPUTER ENGINEERING KHURSHEED, ANJAM integrated,sputter-ion pump, add-on lens,scanning electron microscopes,high vacuum,specimen surface contamination Master's MASTER OF ENGINEERING 2010-04-08T11:00:04Z 2010-04-08T11:00:04Z 2008-09-01 Thesis WU JUNLI (2008-09-01). An integrated sputter-ion pump add-on lens unit for scanning electron microscopes. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/16021 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	integrated,sputter-ion pump, add-on lens,scanning electron microscopes,high vacuum,specimen surface contamination
spellingShingle	integrated,sputter-ion pump, add-on lens,scanning electron microscopes,high vacuum,specimen surface contamination WU JUNLI An integrated sputter-ion pump add-on lens unit for scanning electron microscopes
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING WU JUNLI
format	Theses and Dissertations
author	WU JUNLI
author_sort	WU JUNLI
title	An integrated sputter-ion pump add-on lens unit for scanning electron microscopes
title_short	An integrated sputter-ion pump add-on lens unit for scanning electron microscopes
title_full	An integrated sputter-ion pump add-on lens unit for scanning electron microscopes
title_fullStr	An integrated sputter-ion pump add-on lens unit for scanning electron microscopes
title_full_unstemmed	An integrated sputter-ion pump add-on lens unit for scanning electron microscopes
title_sort	integrated sputter-ion pump add-on lens unit for scanning electron microscopes
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/16021
_version_	1821188598607642624

An integrated sputter-ion pump add-on lens unit for scanning electron microscopes

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