Reduction of charging effects using vector scanning in the scanning electron microscope

Scanning

Saved in:
Bibliographic Details
Main Authors: Thong, J.T.L., Lee, K.W., Wong, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57224
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore