Reduction of charging effects using vector scanning in the scanning electron microscope
Scanning
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Main Authors: | Thong, J.T.L., Lee, K.W., Wong, W.K. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/57224 |
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Institution: | National University of Singapore |
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