In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy

In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy

10.1016/j.sna.2007.04.046

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Bibliographic Details
Main Authors: Wong, C.-L., Wong, W.-K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Displacement
MEMS resonators
Scanning electron microscopy
Stroboscopy
Velocity
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82544
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/82544

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