In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy

10.1016/j.sna.2007.04.046

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Bibliographic Details
Main Authors:	Wong, C.-L., Wong, W.-K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Displacement MEMS resonators Scanning electron microscopy Stroboscopy Velocity
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82544
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82544
record_format	dspace
spelling	sg-nus-scholar.10635-825442023-10-27T08:33:38Z In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy Wong, C.-L. Wong, W.-K. ELECTRICAL & COMPUTER ENGINEERING Displacement MEMS resonators Scanning electron microscopy Stroboscopy Velocity 10.1016/j.sna.2007.04.046 Sensors and Actuators, A: Physical 138 1 167-178 SAAPE 2014-10-07T04:30:38Z 2014-10-07T04:30:38Z 2007-07-20 Article Wong, C.-L., Wong, W.-K. (2007-07-20). In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy. Sensors and Actuators, A: Physical 138 (1) : 167-178. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2007.04.046 09244247 http://scholarbank.nus.edu.sg/handle/10635/82544 000248296900022 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Displacement MEMS resonators Scanning electron microscopy Stroboscopy Velocity
spellingShingle	Displacement MEMS resonators Scanning electron microscopy Stroboscopy Velocity Wong, C.-L. Wong, W.-K. In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy
description	10.1016/j.sna.2007.04.046
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wong, C.-L. Wong, W.-K.
format	Article
author	Wong, C.-L. Wong, W.-K.
author_sort	Wong, C.-L.
title	In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy
title_short	In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy
title_full	In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy
title_fullStr	In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy
title_full_unstemmed	In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy
title_sort	in-plane motion characterization of mems resonators using stroboscopic scanning electron microscopy
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82544
_version_	1781784166609715200

In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy

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