Reduction of charging effects using vector scanning in the scanning electron microscope

Scanning

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Bibliographic Details
Main Authors: Thong, J.T.L., Lee, K.W., Wong, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57224
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Institution: National University of Singapore
Description
Summary:Scanning