A simulation model for electron irradiation induced specimen charging in a scanning electron microscope

A simulation model for electron irradiation induced specimen charging in a scanning electron microscope

Scanning Microscopy

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Bibliographic Details
Main Authors: Chan, D.S.H., Sim, K.S., Phang, J.C.H., Balk, L.J., Uchikawa, Y., Hasselbach, F., Dinnis, A.R.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
electron-beam testing
electron-solid interaction
finite element
Scanning electron microscope
simulation
specimen charging
trajectory tracking
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61715
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/61715

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