A simulation model for electron irradiation induced specimen charging in a scanning electron microscope

A simulation model for electron irradiation induced specimen charging in a scanning electron microscope

Scanning Microscopy

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Bibliographic Details
Main Authors:	Chan, D.S.H., Sim, K.S., Phang, J.C.H., Balk, L.J., Uchikawa, Y., Hasselbach, F., Dinnis, A.R.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	electron-beam testing electron-solid interaction finite element Scanning electron microscope simulation specimen charging trajectory tracking
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61715
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

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