A method of dynamic chromatic aberration correction in low-voltage scanning electron microscopes

A method of dynamic chromatic aberration correction in low-voltage scanning electron microscopes

10.1016/j.ultramic.2004.12.005

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Bibliographic Details
Main Author: Khursheed, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Chromatic aberration
Low-voltage scanning electron microscope
Time-of-flight spectrometer
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54362
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/54362

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