A multi-beam ion/electron spectra-microscope design

A multi-beam ion/electron spectra-microscope design

10.1016/j.ijleo.2007.09.003

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Bibliographic Details
Main Author: Khursheed, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Charged particle beams
Electron energy spectrometers
Focused ion beams
Mass ion spectrometers
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54445
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/54445

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