A simulation model for electron irradiation induced specimen charging in a scanning electron microscope

Scanning Microscopy

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Bibliographic Details
Main Authors:	Chan, D.S.H., Sim, K.S., Phang, J.C.H., Balk, L.J., Uchikawa, Y., Hasselbach, F., Dinnis, A.R.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	electron-beam testing electron-solid interaction finite element Scanning electron microscope simulation specimen charging trajectory tracking
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61715
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61715
record_format	dspace
spelling	sg-nus-scholar.10635-617152015-01-07T18:25:30Z A simulation model for electron irradiation induced specimen charging in a scanning electron microscope Chan, D.S.H. Sim, K.S. Phang, J.C.H. Balk, L.J. Uchikawa, Y. Hasselbach, F. Dinnis, A.R. ELECTRICAL ENGINEERING electron-beam testing electron-solid interaction finite element Scanning electron microscope simulation specimen charging trajectory tracking Scanning Microscopy 7 3 847-859 SCMIE 2014-06-17T06:43:11Z 2014-06-17T06:43:11Z 1993-09 Article Chan, D.S.H.,Sim, K.S.,Phang, J.C.H.,Balk, L.J.,Uchikawa, Y.,Hasselbach, F.,Dinnis, A.R. (1993-09). A simulation model for electron irradiation induced specimen charging in a scanning electron microscope. Scanning Microscopy 7 (3) : 847-859. ScholarBank@NUS Repository. 08917035 http://scholarbank.nus.edu.sg/handle/10635/61715 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	electron-beam testing electron-solid interaction finite element Scanning electron microscope simulation specimen charging trajectory tracking
spellingShingle	electron-beam testing electron-solid interaction finite element Scanning electron microscope simulation specimen charging trajectory tracking Chan, D.S.H. Sim, K.S. Phang, J.C.H. Balk, L.J. Uchikawa, Y. Hasselbach, F. Dinnis, A.R. A simulation model for electron irradiation induced specimen charging in a scanning electron microscope
description	Scanning Microscopy
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Chan, D.S.H. Sim, K.S. Phang, J.C.H. Balk, L.J. Uchikawa, Y. Hasselbach, F. Dinnis, A.R.
format	Article
author	Chan, D.S.H. Sim, K.S. Phang, J.C.H. Balk, L.J. Uchikawa, Y. Hasselbach, F. Dinnis, A.R.
author_sort	Chan, D.S.H.
title	A simulation model for electron irradiation induced specimen charging in a scanning electron microscope
title_short	A simulation model for electron irradiation induced specimen charging in a scanning electron microscope
title_full	A simulation model for electron irradiation induced specimen charging in a scanning electron microscope
title_fullStr	A simulation model for electron irradiation induced specimen charging in a scanning electron microscope
title_full_unstemmed	A simulation model for electron irradiation induced specimen charging in a scanning electron microscope
title_sort	simulation model for electron irradiation induced specimen charging in a scanning electron microscope
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61715
_version_	1681085643989450752

A simulation model for electron irradiation induced specimen charging in a scanning electron microscope

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