Reduction of charging effects using vector scanning in the scanning electron microscope

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Main Authors:	Thong, J.T.L., Lee, K.W., Wong, W.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Raster scan Scanning electron microscopy Specimen charging Vector scanning
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57224
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-57224
record_format	dspace
spelling	sg-nus-scholar.10635-572242015-06-16T20:58:01Z Reduction of charging effects using vector scanning in the scanning electron microscope Thong, J.T.L. Lee, K.W. Wong, W.K. ELECTRICAL & COMPUTER ENGINEERING Raster scan Scanning electron microscopy Specimen charging Vector scanning Scanning 23 6 395-402 SCNND 2014-06-17T03:03:44Z 2014-06-17T03:03:44Z 2001 Article Thong, J.T.L.,Lee, K.W.,Wong, W.K. (2001). Reduction of charging effects using vector scanning in the scanning electron microscope. Scanning 23 (6) : 395-402. ScholarBank@NUS Repository. 01610457 http://scholarbank.nus.edu.sg/handle/10635/57224 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Raster scan Scanning electron microscopy Specimen charging Vector scanning
spellingShingle	Raster scan Scanning electron microscopy Specimen charging Vector scanning Thong, J.T.L. Lee, K.W. Wong, W.K. Reduction of charging effects using vector scanning in the scanning electron microscope
description	Scanning
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Thong, J.T.L. Lee, K.W. Wong, W.K.
format	Article
author	Thong, J.T.L. Lee, K.W. Wong, W.K.
author_sort	Thong, J.T.L.
title	Reduction of charging effects using vector scanning in the scanning electron microscope
title_short	Reduction of charging effects using vector scanning in the scanning electron microscope
title_full	Reduction of charging effects using vector scanning in the scanning electron microscope
title_fullStr	Reduction of charging effects using vector scanning in the scanning electron microscope
title_full_unstemmed	Reduction of charging effects using vector scanning in the scanning electron microscope
title_sort	reduction of charging effects using vector scanning in the scanning electron microscope
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57224
_version_	1681084825496190976

Reduction of charging effects using vector scanning in the scanning electron microscope

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