NITRIDATION AND GROWTH OF TITANIUM THIN FILMS ON SI(100)

Master's

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Bibliographic Details
Main Author:	SIEW HUEH LING
Other Authors:	DEPT OF CHEMISTRY
Format:	Theses and Dissertations
Published:	2019
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/160537
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-160537
record_format	dspace
spelling	sg-nus-scholar.10635-1605372019-10-18T05:59:36Z NITRIDATION AND GROWTH OF TITANIUM THIN FILMS ON SI(100) SIEW HUEH LING DEPT OF CHEMISTRY XU GUO-QIN LAP CHAN Master's MASTER OF SCIENCE 2019-10-18T05:59:35Z 2019-10-18T05:59:35Z 1999 Thesis SIEW HUEH LING (1999). NITRIDATION AND GROWTH OF TITANIUM THIN FILMS ON SI(100). ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/160537 CCK BATCHLOAD 20190911
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Master's
author2	DEPT OF CHEMISTRY
author_facet	DEPT OF CHEMISTRY SIEW HUEH LING
format	Theses and Dissertations
author	SIEW HUEH LING
spellingShingle	SIEW HUEH LING NITRIDATION AND GROWTH OF TITANIUM THIN FILMS ON SI(100)
author_sort	SIEW HUEH LING
title	NITRIDATION AND GROWTH OF TITANIUM THIN FILMS ON SI(100)
title_short	NITRIDATION AND GROWTH OF TITANIUM THIN FILMS ON SI(100)
title_full	NITRIDATION AND GROWTH OF TITANIUM THIN FILMS ON SI(100)
title_fullStr	NITRIDATION AND GROWTH OF TITANIUM THIN FILMS ON SI(100)
title_full_unstemmed	NITRIDATION AND GROWTH OF TITANIUM THIN FILMS ON SI(100)
title_sort	nitridation and growth of titanium thin films on si(100)
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/160537
_version_	1681100092049719296

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