Advanced gate stacks for nano-scale CMOS technology

Ph.D

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Bibliographic Details
Main Author:	WANG XINPENG
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	CMOS, High-k Dielectric, Metal Gate, Work Function Tuning, Integration, Reliability
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/16061
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-16061
record_format	dspace
spelling	sg-nus-scholar.10635-160612015-01-07T10:04:19Z Advanced gate stacks for nano-scale CMOS technology WANG XINPENG ELECTRICAL & COMPUTER ENGINEERING LI MING-FU CMOS, High-k Dielectric, Metal Gate, Work Function Tuning, Integration, Reliability Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T11:00:35Z 2010-04-08T11:00:35Z 2008-08-01 Thesis WANG XINPENG (2008-08-01). Advanced gate stacks for nano-scale CMOS technology. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/16061 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	CMOS, High-k Dielectric, Metal Gate, Work Function Tuning, Integration, Reliability
spellingShingle	CMOS, High-k Dielectric, Metal Gate, Work Function Tuning, Integration, Reliability WANG XINPENG Advanced gate stacks for nano-scale CMOS technology
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING WANG XINPENG
format	Theses and Dissertations
author	WANG XINPENG
author_sort	WANG XINPENG
title	Advanced gate stacks for nano-scale CMOS technology
title_short	Advanced gate stacks for nano-scale CMOS technology
title_full	Advanced gate stacks for nano-scale CMOS technology
title_fullStr	Advanced gate stacks for nano-scale CMOS technology
title_full_unstemmed	Advanced gate stacks for nano-scale CMOS technology
title_sort	advanced gate stacks for nano-scale cmos technology
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/16061
_version_	1681079299451387904

Advanced gate stacks for nano-scale CMOS technology

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