Investigation of adhesion mechanism and pore-sealing layer between tantalum barrier layer and porous SiLK
Master's
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2010
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/16949 |
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sg-nus-scholar.10635-169492017-10-21T07:39:59Z Investigation of adhesion mechanism and pore-sealing layer between tantalum barrier layer and porous SiLK HU YUE PHYSICS FENG YUAN PING SiLK, Ultra-low-k, dielectrics, PECVD, DFT, pore-sealing Master's MASTER OF SCIENCE 2010-05-13T19:25:27Z 2010-05-13T19:25:27Z 2006-11-23 Thesis HU YUE (2006-11-23). Investigation of adhesion mechanism and pore-sealing layer between tantalum barrier layer and porous SiLK. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/16949 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
SiLK, Ultra-low-k, dielectrics, PECVD, DFT, pore-sealing |
| spellingShingle |
SiLK, Ultra-low-k, dielectrics, PECVD, DFT, pore-sealing HU YUE Investigation of adhesion mechanism and pore-sealing layer between tantalum barrier layer and porous SiLK |
| description |
Master's |
| author2 |
PHYSICS |
| author_facet |
PHYSICS HU YUE |
| format |
Theses and Dissertations |
| author |
HU YUE |
| author_sort |
HU YUE |
| title |
Investigation of adhesion mechanism and pore-sealing layer between tantalum barrier layer and porous SiLK |
| title_short |
Investigation of adhesion mechanism and pore-sealing layer between tantalum barrier layer and porous SiLK |
| title_full |
Investigation of adhesion mechanism and pore-sealing layer between tantalum barrier layer and porous SiLK |
| title_fullStr |
Investigation of adhesion mechanism and pore-sealing layer between tantalum barrier layer and porous SiLK |
| title_full_unstemmed |
Investigation of adhesion mechanism and pore-sealing layer between tantalum barrier layer and porous SiLK |
| title_sort |
investigation of adhesion mechanism and pore-sealing layer between tantalum barrier layer and porous silk |
| publishDate |
2010 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/16949 |
| _version_ |
1681079441967546368 |