Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO:Al films for thin-film Si solar cell applications

10.1016/j.vacuum.2015.10.027

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Main Authors:	Yan, Xia, Li, Weimin, Aberle, Armin G, Venkataraj, Selvaraj
Other Authors:	ELECTRICAL AND COMPUTER ENGINEERING
Format:	Article
Language:	English
Published:	PERGAMON-ELSEVIER SCIENCE LTD 2020
Subjects:	Science & Technology Technology Physical Sciences Materials Science, Multidisciplinary Physics, Applied Materials Science Physics ZnO:Al Film thickness Magnetron sputtering Surface texturing Thin film ZINC-OXIDE FILMS ELECTRICAL-PROPERTIES BACK REFLECTORS ETCHED ZNO AL MORPHOLOGIES DEPOSITION
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/171643
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-171643
record_format	dspace
spelling	sg-nus-scholar.10635-1716432024-11-13T03:16:42Z Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO:Al films for thin-film Si solar cell applications Yan, Xia Li, Weimin Aberle, Armin G Venkataraj, Selvaraj ELECTRICAL AND COMPUTER ENGINEERING SOLAR ENERGY RESEARCH INST OF S'PORE Dr Yan Xia Science & Technology Technology Physical Sciences Materials Science, Multidisciplinary Physics, Applied Materials Science Physics ZnO:Al Film thickness Magnetron sputtering Surface texturing Thin film ZINC-OXIDE FILMS ELECTRICAL-PROPERTIES BACK REFLECTORS ETCHED ZNO AL MORPHOLOGIES DEPOSITION 10.1016/j.vacuum.2015.10.027 VACUUM 123 151-159 completed 2020-07-21T07:09:58Z 2020-07-21T07:09:58Z 2016-01-01 2020-07-06T10:47:20Z Article Yan, Xia, Li, Weimin, Aberle, Armin G, Venkataraj, Selvaraj (2016-01-01). Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO:Al films for thin-film Si solar cell applications. VACUUM 123 : 151-159. ScholarBank@NUS Repository. https://doi.org/10.1016/j.vacuum.2015.10.027 0042207X https://scholarbank.nus.edu.sg/handle/10635/171643 en PERGAMON-ELSEVIER SCIENCE LTD Elements
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Science & Technology Technology Physical Sciences Materials Science, Multidisciplinary Physics, Applied Materials Science Physics ZnO:Al Film thickness Magnetron sputtering Surface texturing Thin film ZINC-OXIDE FILMS ELECTRICAL-PROPERTIES BACK REFLECTORS ETCHED ZNO AL MORPHOLOGIES DEPOSITION
spellingShingle	Science & Technology Technology Physical Sciences Materials Science, Multidisciplinary Physics, Applied Materials Science Physics ZnO:Al Film thickness Magnetron sputtering Surface texturing Thin film ZINC-OXIDE FILMS ELECTRICAL-PROPERTIES BACK REFLECTORS ETCHED ZNO AL MORPHOLOGIES DEPOSITION Yan, Xia Li, Weimin Aberle, Armin G Venkataraj, Selvaraj Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO:Al films for thin-film Si solar cell applications
description	10.1016/j.vacuum.2015.10.027
author2	ELECTRICAL AND COMPUTER ENGINEERING
author_facet	ELECTRICAL AND COMPUTER ENGINEERING Yan, Xia Li, Weimin Aberle, Armin G Venkataraj, Selvaraj
format	Article
author	Yan, Xia Li, Weimin Aberle, Armin G Venkataraj, Selvaraj
author_sort	Yan, Xia
title	Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO:Al films for thin-film Si solar cell applications
title_short	Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO:Al films for thin-film Si solar cell applications
title_full	Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO:Al films for thin-film Si solar cell applications
title_fullStr	Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO:Al films for thin-film Si solar cell applications
title_full_unstemmed	Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO:Al films for thin-film Si solar cell applications
title_sort	investigation of the thickness effect on material and surface texturing properties of sputtered zno:al films for thin-film si solar cell applications
publisher	PERGAMON-ELSEVIER SCIENCE LTD
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/171643
_version_	1821182996703608832

Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO:Al films for thin-film Si solar cell applications

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