LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS

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Bibliographic Details
Main Author:	LEE YUAN PING
Other Authors:	ELECTRICAL ENGINEERING
Format:	Theses and Dissertations
Published:	2020
Subjects:	excimer laser irradiation dry and liquid film-enhanced laser cleaning plasma-etch-induced polymers sub-threshold ablation explosive evaporation chemical-assisted laser cleaning
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/174691
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-174691
record_format	dspace
spelling	sg-nus-scholar.10635-1746912024-10-27T01:42:11Z LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS LEE YUAN PING ELECTRICAL ENGINEERING LU YONG FENG excimer laser irradiation dry and liquid film-enhanced laser cleaning plasma-etch-induced polymers sub-threshold ablation explosive evaporation chemical-assisted laser cleaning Master's MASTER OF ENGINEERING 2020-09-08T08:51:19Z 2020-09-08T08:51:19Z 1998 Thesis LEE YUAN PING (1998). LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/174691 CCK BATCHLOAD 20200918
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	excimer laser irradiation dry and liquid film-enhanced laser cleaning plasma-etch-induced polymers sub-threshold ablation explosive evaporation chemical-assisted laser cleaning
spellingShingle	excimer laser irradiation dry and liquid film-enhanced laser cleaning plasma-etch-induced polymers sub-threshold ablation explosive evaporation chemical-assisted laser cleaning LEE YUAN PING LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS
description	Master's
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING LEE YUAN PING
format	Theses and Dissertations
author	LEE YUAN PING
author_sort	LEE YUAN PING
title	LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS
title_short	LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS
title_full	LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS
title_fullStr	LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS
title_full_unstemmed	LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS
title_sort	laser cleaning of plasma-etch-induced polymers from via holes and other submicron structures on silicon wafers
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/174691
_version_	1821231206507741184

LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS

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