LASER CLEANING OF PLASMA-ETCH-INDUCED POLYMERS FROM VIA HOLES AND OTHER SUBMICRON STRUCTURES ON SILICON WAFERS

• Main Author: LEE YUAN PING
• Other Authors: ELECTRICAL ENGINEERING
• Format: Theses and Dissertations
• Published: 2020
• Subjects: excimer laser irradiation; dry and liquid film-enhanced laser cleaning; plasma-etch-induced polymers; sub-threshold ablation; explosive evaporation; chemical-assisted laser cleaning
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/174691
• Institution: National University of Singapore

Master's