Fabrication of large area and precisely located nanostructures on silicon by interference lithography

Ph.D

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Bibliographic Details
Main Author:	LIEW TZE HAW
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	silicon nanostructures, metal nanoparticles, interference lithography, catalytic etching, top-down, bottom-up.
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/17672
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-17672
record_format	dspace
spelling	sg-nus-scholar.10635-176722017-10-21T06:13:35Z Fabrication of large area and precisely located nanostructures on silicon by interference lithography LIEW TZE HAW ELECTRICAL & COMPUTER ENGINEERING CHOI WEE KIONG HONG MINGHUI silicon nanostructures, metal nanoparticles, interference lithography, catalytic etching, top-down, bottom-up. Ph.D DOCTOR OF PHILOSOPHY 2010-07-15T18:00:27Z 2010-07-15T18:00:27Z 2009-10-27 Thesis LIEW TZE HAW (2009-10-27). Fabrication of large area and precisely located nanostructures on silicon by interference lithography. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/17672 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	silicon nanostructures, metal nanoparticles, interference lithography, catalytic etching, top-down, bottom-up.
spellingShingle	silicon nanostructures, metal nanoparticles, interference lithography, catalytic etching, top-down, bottom-up. LIEW TZE HAW Fabrication of large area and precisely located nanostructures on silicon by interference lithography
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING LIEW TZE HAW
format	Theses and Dissertations
author	LIEW TZE HAW
author_sort	LIEW TZE HAW
title	Fabrication of large area and precisely located nanostructures on silicon by interference lithography
title_short	Fabrication of large area and precisely located nanostructures on silicon by interference lithography
title_full	Fabrication of large area and precisely located nanostructures on silicon by interference lithography
title_fullStr	Fabrication of large area and precisely located nanostructures on silicon by interference lithography
title_full_unstemmed	Fabrication of large area and precisely located nanostructures on silicon by interference lithography
title_sort	fabrication of large area and precisely located nanostructures on silicon by interference lithography
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/17672
_version_	1681079509875425280

Fabrication of large area and precisely located nanostructures on silicon by interference lithography

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