Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching

Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching

10.1142/S0219581X10006867

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Bibliographic Details
Main Authors: Si, G.Y., Danner, A.J., Teng, J.H., Ang, S.S., Chew, A.B., Dogheche, E.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
interference lithography
LiNbO3 dense arrays
plasma etching
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83998
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/83998

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