Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching

10.1142/S0219581X10006867

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Bibliographic Details
Main Authors:	Si, G.Y., Danner, A.J., Teng, J.H., Ang, S.S., Chew, A.B., Dogheche, E.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	interference lithography LiNbO3 dense arrays plasma etching
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83998
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83998
record_format	dspace
spelling	sg-nus-scholar.10635-839982023-10-29T23:29:18Z Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching Si, G.Y. Danner, A.J. Teng, J.H. Ang, S.S. Chew, A.B. Dogheche, E. ELECTRICAL & COMPUTER ENGINEERING interference lithography LiNbO3 dense arrays plasma etching 10.1142/S0219581X10006867 International Journal of Nanoscience 9 4 311-315 2014-10-07T04:47:37Z 2014-10-07T04:47:37Z 2010-08 Conference Paper Si, G.Y., Danner, A.J., Teng, J.H., Ang, S.S., Chew, A.B., Dogheche, E. (2010-08). Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching. International Journal of Nanoscience 9 (4) : 311-315. ScholarBank@NUS Repository. https://doi.org/10.1142/S0219581X10006867 0219581X http://scholarbank.nus.edu.sg/handle/10635/83998 000216785500013 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	interference lithography LiNbO3 dense arrays plasma etching
spellingShingle	interference lithography LiNbO3 dense arrays plasma etching Si, G.Y. Danner, A.J. Teng, J.H. Ang, S.S. Chew, A.B. Dogheche, E. Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching
description	10.1142/S0219581X10006867
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Si, G.Y. Danner, A.J. Teng, J.H. Ang, S.S. Chew, A.B. Dogheche, E.
format	Conference or Workshop Item
author	Si, G.Y. Danner, A.J. Teng, J.H. Ang, S.S. Chew, A.B. Dogheche, E.
author_sort	Si, G.Y.
title	Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching
title_short	Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching
title_full	Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching
title_fullStr	Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching
title_full_unstemmed	Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching
title_sort	nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83998
_version_	1781784412671705088

Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching

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