Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching

Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching

10.1142/S0219581X10006867

Saved in:
Bibliographic Details
Main Authors: Si, G.Y., Danner, A.J., Teng, J.H., Ang, S.S., Chew, A.B., Dogheche, E.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
interference lithography
LiNbO3 dense arrays
plasma etching
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83998
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:10.1142/S0219581X10006867

Similar Items