Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques

Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques

Ph.D

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Bibliographic Details
Main Author: GOH SZU HUAT
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2010
Subjects:
Resolution enhancement, Refractive Solid Immersion Lens, diffraction integrals, spherical aberration, laser induced fault localization
Online Access:http://scholarbank.nus.edu.sg/handle/10635/17707
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Institution: National University of Singapore
Language: English

Internet

http://scholarbank.nus.edu.sg/handle/10635/17707

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