$Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques$

Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques

Ph.D

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Bibliographic Details
Main Author:	GOH SZU HUAT
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Resolution enhancement, Refractive Solid Immersion Lens, diffraction integrals, spherical aberration, laser induced fault localization
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/17707
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-17707
record_format	dspace
spelling	sg-nus-scholar.10635-177072015-01-09T11:23:48Z Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques GOH SZU HUAT ELECTRICAL & COMPUTER ENGINEERING PHANG C H, JACOB SHEPPARD, COLIN JAMES RICHARD Resolution enhancement, Refractive Solid Immersion Lens, diffraction integrals, spherical aberration, laser induced fault localization Ph.D DOCTOR OF PHILOSOPHY 2010-07-15T18:01:17Z 2010-07-15T18:01:17Z 2009-07-20 Thesis GOH SZU HUAT (2009-07-20). Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/17707 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Resolution enhancement, Refractive Solid Immersion Lens, diffraction integrals, spherical aberration, laser induced fault localization
spellingShingle	Resolution enhancement, Refractive Solid Immersion Lens, diffraction integrals, spherical aberration, laser induced fault localization GOH SZU HUAT Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING GOH SZU HUAT
format	Theses and Dissertations
author	GOH SZU HUAT
author_sort	GOH SZU HUAT
title	Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques
title_short	Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques
title_full	Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques
title_fullStr	Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques
title_full_unstemmed	Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques
title_sort	development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/17707
_version_	1681079515730673664

Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques

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