A miniature on-chip methane sensor based on an ultra-low loss waveguide and a micro-ring resonator filter

• Main Authors: Qiao, Y, Tao, J, Chen, C.-H, Qiu, J, Tian, Y, Hong, X, Wu, J
• Other Authors: BIOMEDICAL ENGINEERING
• Format: Article
• Published: 2020
• Subjects: Bandpass filters; Evanescent fields; Infrared devices; Methane; MOEMS; Optical resonators; Optical waveguides; Resonators; Semiconducting silicon; Semiconductor materials; Silicon nitride; Waveguides; Gas detection; Low-loss waveguides; Methane concentrations; Microring resonator; Near infrared band; Numerical calculation; Photonics sensors; Strip waveguides; Waveguide filters
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/178725
• Institution: National University of Singapore

10.3390/mi8050160