A miniature on-chip methane sensor based on an ultra-low loss waveguide and a micro-ring resonator filter

A miniature on-chip methane sensor based on an ultra-low loss waveguide and a micro-ring resonator filter

10.3390/mi8050160

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Bibliographic Details
Main Authors:	Qiao, Y, Tao, J, Chen, C.-H, Qiu, J, Tian, Y, Hong, X, Wu, J
Other Authors:	BIOMEDICAL ENGINEERING
Format:	Article
Published:	2020
Subjects:	Bandpass filters Evanescent fields Infrared devices Methane MOEMS Optical resonators Optical waveguides Resonators Semiconducting silicon Semiconductor materials Silicon nitride Waveguides Gas detection Low-loss waveguides Methane concentrations Microring resonator Near infrared band Numerical calculation Photonics sensors Strip waveguides Waveguide filters
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/178725
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Institution:	National University of Singapore

Description
Summary:	10.3390/mi8050160