FABRICATION OF ISOLATED SILICON ISLANDS BY TMAH ETCHING

Master's

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Bibliographic Details
Main Author:	ANU AUSTIN
Other Authors:	ELECTRICAL ENGINEERING
Format:	Theses and Dissertations
Published:	2020
Subjects:	Silicon micromachining anisotropic etching silicon islands TMAH Titanium resistor thermal isolation
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/180022
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-180022
record_format	dspace
spelling	sg-nus-scholar.10635-1800222020-11-19T13:57:18Z FABRICATION OF ISOLATED SILICON ISLANDS BY TMAH ETCHING ANU AUSTIN ELECTRICAL ENGINEERING GAMANI KARUNASIRI Silicon micromachining anisotropic etching silicon islands TMAH Titanium resistor thermal isolation Master's MASTER OF ENGINEERING 2020-10-26T06:32:18Z 2020-10-26T06:32:18Z 1999 Thesis ANU AUSTIN (1999). FABRICATION OF ISOLATED SILICON ISLANDS BY TMAH ETCHING. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/180022 CCK BATCHLOAD 20201023
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Silicon micromachining anisotropic etching silicon islands TMAH Titanium resistor thermal isolation
spellingShingle	Silicon micromachining anisotropic etching silicon islands TMAH Titanium resistor thermal isolation ANU AUSTIN FABRICATION OF ISOLATED SILICON ISLANDS BY TMAH ETCHING
description	Master's
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING ANU AUSTIN
format	Theses and Dissertations
author	ANU AUSTIN
author_sort	ANU AUSTIN
title	FABRICATION OF ISOLATED SILICON ISLANDS BY TMAH ETCHING
title_short	FABRICATION OF ISOLATED SILICON ISLANDS BY TMAH ETCHING
title_full	FABRICATION OF ISOLATED SILICON ISLANDS BY TMAH ETCHING
title_fullStr	FABRICATION OF ISOLATED SILICON ISLANDS BY TMAH ETCHING
title_full_unstemmed	FABRICATION OF ISOLATED SILICON ISLANDS BY TMAH ETCHING
title_sort	fabrication of isolated silicon islands by tmah etching
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/180022
_version_	1686109085932453888

FABRICATION OF ISOLATED SILICON ISLANDS BY TMAH ETCHING

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