Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology

Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology

10.1103/PhysRevX.5.021014

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Bibliographic Details
Main Authors: Agarwal, K, Chen, R, Koh, L.S, Sheppard, C.J.R, Chen, X
Other Authors: BIOMEDICAL ENGINEERING
Format: Article
Published: 2020
Subjects:
Image reconstruction
Imaging techniques
Infrared devices
Infrared imaging
Optical data storage
Optical microscopy
Silicon
Thermography (imaging)
Experimental evidence
High-resolution imaging
Industry requirements
Microscopy technique
Near infrared light
Near-infrared imaging
Non-destructive imaging
Solid immersion lens
Failure analysis
Online Access:https://scholarbank.nus.edu.sg/handle/10635/183605
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Institution: National University of Singapore

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https://scholarbank.nus.edu.sg/handle/10635/183605

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