Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology

10.1103/PhysRevX.5.021014

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Bibliographic Details
Main Authors:	Agarwal, K, Chen, R, Koh, L.S, Sheppard, C.J.R, Chen, X
Other Authors:	BIOMEDICAL ENGINEERING
Format:	Article
Published:	2020
Subjects:	Image reconstruction Imaging techniques Infrared devices Infrared imaging Optical data storage Optical microscopy Silicon Thermography (imaging) Experimental evidence High-resolution imaging Industry requirements Microscopy technique Near infrared light Near-infrared imaging Non-destructive imaging Solid immersion lens Failure analysis
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/183605
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-183605
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spelling	sg-nus-scholar.10635-1836052024-04-15T12:40:08Z Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology Agarwal, K Chen, R Koh, L.S Sheppard, C.J.R Chen, X BIOMEDICAL ENGINEERING DEPT OF ELECTRICAL & COMPUTER ENGG Image reconstruction Imaging techniques Infrared devices Infrared imaging Optical data storage Optical microscopy Silicon Thermography (imaging) Experimental evidence High-resolution imaging Industry requirements Microscopy technique Near infrared light Near-infrared imaging Non-destructive imaging Solid immersion lens Failure analysis 10.1103/PhysRevX.5.021014 Physical Review X 5 2 21014 2020-11-17T08:54:01Z 2020-11-17T08:54:01Z 2015 Article Agarwal, K, Chen, R, Koh, L.S, Sheppard, C.J.R, Chen, X (2015). Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology. Physical Review X 5 (2) : 21014. ScholarBank@NUS Repository. https://doi.org/10.1103/PhysRevX.5.021014 21603308 https://scholarbank.nus.edu.sg/handle/10635/183605 Attribution 4.0 International http://creativecommons.org/licenses/by/4.0/ Unpaywall 20201031
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Image reconstruction Imaging techniques Infrared devices Infrared imaging Optical data storage Optical microscopy Silicon Thermography (imaging) Experimental evidence High-resolution imaging Industry requirements Microscopy technique Near infrared light Near-infrared imaging Non-destructive imaging Solid immersion lens Failure analysis
spellingShingle	Image reconstruction Imaging techniques Infrared devices Infrared imaging Optical data storage Optical microscopy Silicon Thermography (imaging) Experimental evidence High-resolution imaging Industry requirements Microscopy technique Near infrared light Near-infrared imaging Non-destructive imaging Solid immersion lens Failure analysis Agarwal, K Chen, R Koh, L.S Sheppard, C.J.R Chen, X Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology
description	10.1103/PhysRevX.5.021014
author2	BIOMEDICAL ENGINEERING
author_facet	BIOMEDICAL ENGINEERING Agarwal, K Chen, R Koh, L.S Sheppard, C.J.R Chen, X
format	Article
author	Agarwal, K Chen, R Koh, L.S Sheppard, C.J.R Chen, X
author_sort	Agarwal, K
title	Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology
title_short	Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology
title_full	Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology
title_fullStr	Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology
title_full_unstemmed	Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology
title_sort	crossing the resolution limit in near-infrared imaging of silicon chips: targeting 10-nm node technology
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/183605
_version_	1800914712947326976

Crossing the resolution limit in near-infrared imaging of silicon chips: Targeting 10-nm node technology

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