$Groove Density Measurements for the VLS grating by Diffraction Method$

Groove Density Measurements for the VLS grating by Diffraction Method

10.1063/1.1757922

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Bibliographic Details
Main Authors:	Hu, ZW, Yu, XJ, Chen, Q, Liu, ZP, Wang, QP
Other Authors:	SINGAPORE SYNCHROTRON LIGHT SOURCE
Format:	Conference or Workshop Item
Published:	AIP 2021
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/186560
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Institution:	National University of Singapore

Description
Summary:	10.1063/1.1757922

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