Groove Density Measurements for the VLS grating by Diffraction Method

10.1063/1.1757922

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Bibliographic Details
Main Authors: Hu, ZW, Yu, XJ, Chen, Q, Liu, ZP, Wang, QP
Other Authors: SINGAPORE SYNCHROTRON LIGHT SOURCE
Format: Conference or Workshop Item
Published: AIP 2021
Online Access:https://scholarbank.nus.edu.sg/handle/10635/186560
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-1865602021-02-22T13:15:09Z Groove Density Measurements for the VLS grating by Diffraction Method Hu, ZW Yu, XJ Chen, Q Liu, ZP Wang, QP SINGAPORE SYNCHROTRON LIGHT SOURCE 10.1063/1.1757922 SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation 2021-02-22T01:11:21Z 2021-02-22T01:11:21Z 2004 2021-02-19T10:06:48Z Conference Paper Hu, ZW, Yu, XJ, Chen, Q, Liu, ZP, Wang, QP (2004). Groove Density Measurements for the VLS grating by Diffraction Method. SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1757922 0094243X https://scholarbank.nus.edu.sg/handle/10635/186560 AIP Elements
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.1757922
author2 SINGAPORE SYNCHROTRON LIGHT SOURCE
author_facet SINGAPORE SYNCHROTRON LIGHT SOURCE
Hu, ZW
Yu, XJ
Chen, Q
Liu, ZP
Wang, QP
format Conference or Workshop Item
author Hu, ZW
Yu, XJ
Chen, Q
Liu, ZP
Wang, QP
spellingShingle Hu, ZW
Yu, XJ
Chen, Q
Liu, ZP
Wang, QP
Groove Density Measurements for the VLS grating by Diffraction Method
author_sort Hu, ZW
title Groove Density Measurements for the VLS grating by Diffraction Method
title_short Groove Density Measurements for the VLS grating by Diffraction Method
title_full Groove Density Measurements for the VLS grating by Diffraction Method
title_fullStr Groove Density Measurements for the VLS grating by Diffraction Method
title_full_unstemmed Groove Density Measurements for the VLS grating by Diffraction Method
title_sort groove density measurements for the vls grating by diffraction method
publisher AIP
publishDate 2021
url https://scholarbank.nus.edu.sg/handle/10635/186560
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