High depth resolution profiling for magnetic-sector secondary ion mass spectrometry (SIMS)

Ph.D

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Bibliographic Details
Main Author:	LIU RONG
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2011
Subjects:	SIMS, surface roughening, sample rotation, high depth resolution
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/18895
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Institution:	National University of Singapore
Language:	English

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record_format	dspace
spelling	sg-nus-scholar.10635-188952017-10-21T07:52:21Z High depth resolution profiling for magnetic-sector secondary ion mass spectrometry (SIMS) LIU RONG PHYSICS WEE THYE SHEN, ANDREW SIMS, surface roughening, sample rotation, high depth resolution Ph.D DOCTOR OF PHILOSOPHY 2011-01-05T18:00:47Z 2011-01-05T18:00:47Z 2006-01-01 Thesis LIU RONG (2006-01-01). High depth resolution profiling for magnetic-sector secondary ion mass spectrometry (SIMS). ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/18895 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	SIMS, surface roughening, sample rotation, high depth resolution
spellingShingle	SIMS, surface roughening, sample rotation, high depth resolution LIU RONG High depth resolution profiling for magnetic-sector secondary ion mass spectrometry (SIMS)
description	Ph.D
author2	PHYSICS
author_facet	PHYSICS LIU RONG
format	Theses and Dissertations
author	LIU RONG
author_sort	LIU RONG
title	High depth resolution profiling for magnetic-sector secondary ion mass spectrometry (SIMS)
title_short	High depth resolution profiling for magnetic-sector secondary ion mass spectrometry (SIMS)
title_full	High depth resolution profiling for magnetic-sector secondary ion mass spectrometry (SIMS)
title_fullStr	High depth resolution profiling for magnetic-sector secondary ion mass spectrometry (SIMS)
title_full_unstemmed	High depth resolution profiling for magnetic-sector secondary ion mass spectrometry (SIMS)
title_sort	high depth resolution profiling for magnetic-sector secondary ion mass spectrometry (sims)
publishDate	2011
url	http://scholarbank.nus.edu.sg/handle/10635/18895
_version_	1681079579569029120

High depth resolution profiling for magnetic-sector secondary ion mass spectrometry (SIMS)

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