Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding

Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding

10.1016/j.apsusc.2004.03.136

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Bibliographic Details
Main Authors: Liu, R., Wee, A.T.S.
Other Authors: INSTITUTE OF ENGINEERING SCIENCE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Oxygen flooding
Sample rotation
SIMS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/116787
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/116787

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