Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f

Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f

10.1117/12.405374

Saved in:
Bibliographic Details
Main Authors: Ng, C.M., Wee, A.T.S., Huan, C.H.A., See, A.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Boron deltas
Low energy profiling
Oxygen flooding
Sample rotation
Secondary ion mass spectrometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98946
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/98946

Similar Items