Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f

• Main Authors: Ng, C.M., Wee, A.T.S., Huan, C.H.A., See, A.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Boron deltas; Low energy profiling; Oxygen flooding; Sample rotation; Secondary ion mass spectrometry
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98946
• Institution: National University of Singapore

10.1117/12.405374