Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f
10.1117/12.405374
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2014
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sg-nus-scholar.10635-989462023-10-30T08:17:22Z Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. PHYSICS Boron deltas Low energy profiling Oxygen flooding Sample rotation Secondary ion mass spectrometry 10.1117/12.405374 Proceedings of SPIE - The International Society for Optical Engineering 4227 90-97 PSISD 2014-10-16T09:53:21Z 2014-10-16T09:53:21Z 2000 Conference Paper Ng, C.M., Wee, A.T.S., Huan, C.H.A., See, A. (2000). Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f. Proceedings of SPIE - The International Society for Optical Engineering 4227 : 90-97. ScholarBank@NUS Repository. https://doi.org/10.1117/12.405374 0277786X http://scholarbank.nus.edu.sg/handle/10635/98946 000167995300016 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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Boron deltas Low energy profiling Oxygen flooding Sample rotation Secondary ion mass spectrometry |
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Boron deltas Low energy profiling Oxygen flooding Sample rotation Secondary ion mass spectrometry Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f |
| description |
10.1117/12.405374 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. |
| format |
Conference or Workshop Item |
| author |
Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. |
| author_sort |
Ng, C.M. |
| title |
Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f |
| title_short |
Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f |
| title_full |
Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f |
| title_fullStr |
Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f |
| title_full_unstemmed |
Ultra shallow depth profiling of B deltas in Si using a CAMECA IMS 6f |
| title_sort |
ultra shallow depth profiling of b deltas in si using a cameca ims 6f |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98946 |
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1781786978405056512 |