Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding
10.1016/j.apsusc.2004.03.136
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Main Authors: | Liu, R., Wee, A.T.S. |
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Other Authors: | INSTITUTE OF ENGINEERING SCIENCE |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/116787 |
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Institution: | National University of Singapore |
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