Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution

Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution

10.1016/S0168-583X(01)00633-4

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Bibliographic Details
Main Authors: Ng, C.M., Wee, A.T.S., Huan, C.H.A., See, A.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98495
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/98495

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