Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution
10.1016/S0168-583X(01)00633-4
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2014
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sg-nus-scholar.10635-984952023-10-31T07:01:47Z Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. PHYSICS 10.1016/S0168-583X(01)00633-4 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 179 4 557-560 NIMBE 2014-10-16T09:47:45Z 2014-10-16T09:47:45Z 2001-09 Article Ng, C.M., Wee, A.T.S., Huan, C.H.A., See, A. (2001-09). Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 179 (4) : 557-560. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(01)00633-4 0168583X http://scholarbank.nus.edu.sg/handle/10635/98495 000171110400014 Scopus |
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Asia |
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Singapore Singapore |
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10.1016/S0168-583X(01)00633-4 |
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PHYSICS |
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PHYSICS Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. |
| format |
Article |
| author |
Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. |
| spellingShingle |
Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution |
| author_sort |
Ng, C.M. |
| title |
Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution |
| title_short |
Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution |
| title_full |
Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution |
| title_fullStr |
Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution |
| title_full_unstemmed |
Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution |
| title_sort |
ultra shallow secondary ion mass spectrometry depth profiling: limitation of sample rotation in improving depth resolution |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98495 |
| _version_ |
1781786887968522240 |