Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding

10.1016/j.apsusc.2004.03.136

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Bibliographic Details
Main Authors:	Liu, R., Wee, A.T.S.
Other Authors:	INSTITUTE OF ENGINEERING SCIENCE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Oxygen flooding Sample rotation SIMS
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/116787
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-116787
record_format	dspace
spelling	sg-nus-scholar.10635-1167872023-09-21T20:47:02Z Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding Liu, R. Wee, A.T.S. INSTITUTE OF ENGINEERING SCIENCE PHYSICS Oxygen flooding Sample rotation SIMS 10.1016/j.apsusc.2004.03.136 Applied Surface Science 231-232 653-657 ASUSE 2014-12-12T07:54:07Z 2014-12-12T07:54:07Z 2004-06-15 Conference Paper Liu, R., Wee, A.T.S. (2004-06-15). Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding. Applied Surface Science 231-232 : 653-657. ScholarBank@NUS Repository. https://doi.org/10.1016/j.apsusc.2004.03.136 01694332 http://scholarbank.nus.edu.sg/handle/10635/116787 000222427700127 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Oxygen flooding Sample rotation SIMS
spellingShingle	Oxygen flooding Sample rotation SIMS Liu, R. Wee, A.T.S. Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding
description	10.1016/j.apsusc.2004.03.136
author2	INSTITUTE OF ENGINEERING SCIENCE
author_facet	INSTITUTE OF ENGINEERING SCIENCE Liu, R. Wee, A.T.S.
format	Conference or Workshop Item
author	Liu, R. Wee, A.T.S.
author_sort	Liu, R.
title	Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding
title_short	Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding
title_full	Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding
title_fullStr	Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding
title_full_unstemmed	Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding
title_sort	sub-kev secondary ion mass spectrometry depth profiling: comparison of sample rotation and oxygen flooding
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/116787
_version_	1779170726201262080

Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen flooding

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