Development Trends and Perspectives of Future Sensors and MEMS/NEMS

• Main Authors: Zhu, Jianxiong, Liu, Xinmiao, Shi, Qiongfeng, He, Tianyiyi, Sun, Zhongda, Guo, Xinge, Liu, Weixin, Bin Sulaiman, Othman, Dong, Bowei, Lee, Chengkuo
• Other Authors: DEPT OF ELECTRICAL & COMPUTER ENGG
• Format: Review
• Language: English
• Published: MDPI 2021
• Subjects: Science & Technology; Physical Sciences; Technology; Chemistry, Analytical; Nanoscience & Nanotechnology; Instruments & Instrumentation; Physics, Applied; Chemistry; Science & Technology - Other Topics; Physics; MEMS sensor; zero-power sensor; flexible sensor; human-machine interface; machine learning; artificial intelligence; CAPACITIVE MEMS ACCELEROMETER; TRIBOELECTRIC NANOGENERATOR; ENERGY HARVESTER; LOW-NOISE; MICRO; POWER; GAS; INTERFACE; SINGLE; CALIBRATION
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/189502
• Institution: National University of Singapore

10.3390/mi11010007