Development Trends and Perspectives of Future Sensors and MEMS/NEMS

10.3390/mi11010007

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Main Authors: Zhu, Jianxiong, Liu, Xinmiao, Shi, Qiongfeng, He, Tianyiyi, Sun, Zhongda, Guo, Xinge, Liu, Weixin, Bin Sulaiman, Othman, Dong, Bowei, Lee, Chengkuo
Other Authors: DEPT OF ELECTRICAL & COMPUTER ENGG
Format: Review
Language:English
Published: MDPI 2021
Subjects:
GAS
Online Access:https://scholarbank.nus.edu.sg/handle/10635/189502
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Institution: National University of Singapore
Language: English
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spelling sg-nus-scholar.10635-1895022023-09-05T22:11:22Z Development Trends and Perspectives of Future Sensors and MEMS/NEMS Zhu, Jianxiong Liu, Xinmiao Shi, Qiongfeng He, Tianyiyi Sun, Zhongda Guo, Xinge Liu, Weixin Bin Sulaiman, Othman Dong, Bowei Lee, Chengkuo DEPT OF ELECTRICAL & COMPUTER ENGG Science & Technology Physical Sciences Technology Chemistry, Analytical Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Chemistry Science & Technology - Other Topics Physics MEMS sensor zero-power sensor flexible sensor human-machine interface machine learning artificial intelligence CAPACITIVE MEMS ACCELEROMETER TRIBOELECTRIC NANOGENERATOR ENERGY HARVESTER LOW-NOISE MICRO POWER GAS INTERFACE SINGLE CALIBRATION 10.3390/mi11010007 MICROMACHINES 11 1 2021-04-16T07:16:23Z 2021-04-16T07:16:23Z 2020-01-01 2021-04-16T05:02:54Z Review Zhu, Jianxiong, Liu, Xinmiao, Shi, Qiongfeng, He, Tianyiyi, Sun, Zhongda, Guo, Xinge, Liu, Weixin, Bin Sulaiman, Othman, Dong, Bowei, Lee, Chengkuo (2020-01-01). Development Trends and Perspectives of Future Sensors and MEMS/NEMS. MICROMACHINES 11 (1). ScholarBank@NUS Repository. https://doi.org/10.3390/mi11010007 2072666X https://scholarbank.nus.edu.sg/handle/10635/189502 en MDPI Elements
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
language English
topic Science & Technology
Physical Sciences
Technology
Chemistry, Analytical
Nanoscience & Nanotechnology
Instruments & Instrumentation
Physics, Applied
Chemistry
Science & Technology - Other Topics
Physics
MEMS sensor
zero-power sensor
flexible sensor
human-machine interface
machine learning
artificial intelligence
CAPACITIVE MEMS ACCELEROMETER
TRIBOELECTRIC NANOGENERATOR
ENERGY HARVESTER
LOW-NOISE
MICRO
POWER
GAS
INTERFACE
SINGLE
CALIBRATION
spellingShingle Science & Technology
Physical Sciences
Technology
Chemistry, Analytical
Nanoscience & Nanotechnology
Instruments & Instrumentation
Physics, Applied
Chemistry
Science & Technology - Other Topics
Physics
MEMS sensor
zero-power sensor
flexible sensor
human-machine interface
machine learning
artificial intelligence
CAPACITIVE MEMS ACCELEROMETER
TRIBOELECTRIC NANOGENERATOR
ENERGY HARVESTER
LOW-NOISE
MICRO
POWER
GAS
INTERFACE
SINGLE
CALIBRATION
Zhu, Jianxiong
Liu, Xinmiao
Shi, Qiongfeng
He, Tianyiyi
Sun, Zhongda
Guo, Xinge
Liu, Weixin
Bin Sulaiman, Othman
Dong, Bowei
Lee, Chengkuo
Development Trends and Perspectives of Future Sensors and MEMS/NEMS
description 10.3390/mi11010007
author2 DEPT OF ELECTRICAL & COMPUTER ENGG
author_facet DEPT OF ELECTRICAL & COMPUTER ENGG
Zhu, Jianxiong
Liu, Xinmiao
Shi, Qiongfeng
He, Tianyiyi
Sun, Zhongda
Guo, Xinge
Liu, Weixin
Bin Sulaiman, Othman
Dong, Bowei
Lee, Chengkuo
format Review
author Zhu, Jianxiong
Liu, Xinmiao
Shi, Qiongfeng
He, Tianyiyi
Sun, Zhongda
Guo, Xinge
Liu, Weixin
Bin Sulaiman, Othman
Dong, Bowei
Lee, Chengkuo
author_sort Zhu, Jianxiong
title Development Trends and Perspectives of Future Sensors and MEMS/NEMS
title_short Development Trends and Perspectives of Future Sensors and MEMS/NEMS
title_full Development Trends and Perspectives of Future Sensors and MEMS/NEMS
title_fullStr Development Trends and Perspectives of Future Sensors and MEMS/NEMS
title_full_unstemmed Development Trends and Perspectives of Future Sensors and MEMS/NEMS
title_sort development trends and perspectives of future sensors and mems/nems
publisher MDPI
publishDate 2021
url https://scholarbank.nus.edu.sg/handle/10635/189502
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