Development Trends and Perspectives of Future Sensors and MEMS/NEMS
10.3390/mi11010007
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2021
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sg-nus-scholar.10635-1895022023-09-05T22:11:22Z Development Trends and Perspectives of Future Sensors and MEMS/NEMS Zhu, Jianxiong Liu, Xinmiao Shi, Qiongfeng He, Tianyiyi Sun, Zhongda Guo, Xinge Liu, Weixin Bin Sulaiman, Othman Dong, Bowei Lee, Chengkuo DEPT OF ELECTRICAL & COMPUTER ENGG Science & Technology Physical Sciences Technology Chemistry, Analytical Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Chemistry Science & Technology - Other Topics Physics MEMS sensor zero-power sensor flexible sensor human-machine interface machine learning artificial intelligence CAPACITIVE MEMS ACCELEROMETER TRIBOELECTRIC NANOGENERATOR ENERGY HARVESTER LOW-NOISE MICRO POWER GAS INTERFACE SINGLE CALIBRATION 10.3390/mi11010007 MICROMACHINES 11 1 2021-04-16T07:16:23Z 2021-04-16T07:16:23Z 2020-01-01 2021-04-16T05:02:54Z Review Zhu, Jianxiong, Liu, Xinmiao, Shi, Qiongfeng, He, Tianyiyi, Sun, Zhongda, Guo, Xinge, Liu, Weixin, Bin Sulaiman, Othman, Dong, Bowei, Lee, Chengkuo (2020-01-01). Development Trends and Perspectives of Future Sensors and MEMS/NEMS. MICROMACHINES 11 (1). ScholarBank@NUS Repository. https://doi.org/10.3390/mi11010007 2072666X https://scholarbank.nus.edu.sg/handle/10635/189502 en MDPI Elements |
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Science & Technology Physical Sciences Technology Chemistry, Analytical Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Chemistry Science & Technology - Other Topics Physics MEMS sensor zero-power sensor flexible sensor human-machine interface machine learning artificial intelligence CAPACITIVE MEMS ACCELEROMETER TRIBOELECTRIC NANOGENERATOR ENERGY HARVESTER LOW-NOISE MICRO POWER GAS INTERFACE SINGLE CALIBRATION |
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Science & Technology Physical Sciences Technology Chemistry, Analytical Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Chemistry Science & Technology - Other Topics Physics MEMS sensor zero-power sensor flexible sensor human-machine interface machine learning artificial intelligence CAPACITIVE MEMS ACCELEROMETER TRIBOELECTRIC NANOGENERATOR ENERGY HARVESTER LOW-NOISE MICRO POWER GAS INTERFACE SINGLE CALIBRATION Zhu, Jianxiong Liu, Xinmiao Shi, Qiongfeng He, Tianyiyi Sun, Zhongda Guo, Xinge Liu, Weixin Bin Sulaiman, Othman Dong, Bowei Lee, Chengkuo Development Trends and Perspectives of Future Sensors and MEMS/NEMS |
description |
10.3390/mi11010007 |
author2 |
DEPT OF ELECTRICAL & COMPUTER ENGG |
author_facet |
DEPT OF ELECTRICAL & COMPUTER ENGG Zhu, Jianxiong Liu, Xinmiao Shi, Qiongfeng He, Tianyiyi Sun, Zhongda Guo, Xinge Liu, Weixin Bin Sulaiman, Othman Dong, Bowei Lee, Chengkuo |
format |
Review |
author |
Zhu, Jianxiong Liu, Xinmiao Shi, Qiongfeng He, Tianyiyi Sun, Zhongda Guo, Xinge Liu, Weixin Bin Sulaiman, Othman Dong, Bowei Lee, Chengkuo |
author_sort |
Zhu, Jianxiong |
title |
Development Trends and Perspectives of Future Sensors and MEMS/NEMS |
title_short |
Development Trends and Perspectives of Future Sensors and MEMS/NEMS |
title_full |
Development Trends and Perspectives of Future Sensors and MEMS/NEMS |
title_fullStr |
Development Trends and Perspectives of Future Sensors and MEMS/NEMS |
title_full_unstemmed |
Development Trends and Perspectives of Future Sensors and MEMS/NEMS |
title_sort |
development trends and perspectives of future sensors and mems/nems |
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MDPI |
publishDate |
2021 |
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https://scholarbank.nus.edu.sg/handle/10635/189502 |
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1779153351090372608 |