LIQUID-PHASE TRANSMISSION ELECTRON MICROSCOPY AS A METROLOGY PLATFORM FOR DEVELOPING FUTURE VERTICAL TRANSISTORS

Ph.D

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Bibliographic Details
Main Author:	ANAND UTKARSH
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2021
Subjects:	Liquid-phase TEM, Nanofabrication, Vertical nanowires, Capillary force, Pattern collapse, Machine learning
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/203798
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Institution:	National University of Singapore
Language:	English

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