LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN

LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN

Ph.D

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Bibliographic Details
Main Author: BALAMUNIAPPAN PRANESH
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Published: 2021
Subjects:
Multi-column SEM, Miniature Objective lens, e-beam wafer inspection system, Permanent Magnet, High-resolution miniature objective lens
Online Access:https://scholarbank.nus.edu.sg/handle/10635/209015
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Institution: National University of Singapore

Internet

https://scholarbank.nus.edu.sg/handle/10635/209015

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